Turbo Pumps

Turbo pumps are high-speed vacuum pumps that create extremely low pressures. They are crucial in semiconductor processing for achieving high-vacuum conditions essential for precise manufacturing tasks.

  6. LEYBOLD TURBO PUMP 1150 L/S

    Turbo Pumps

    LEYBOLD TURBO PUMP 1150 L/S

    Rebuilt Turbo PumpPart Number: 85536 NB:  Rebuilding will take place once order is placed.  

  7. LEYBOLD TURBO PUMP 1150 L/S

    Turbo Pumps

    LEYBOLD TURBO PUMP 1150 L/S

    Rebuilt Turbo PumpPart Number: 85535 NB:  Rebuilding will take place once order is placed.  

Popular Manufacturers

Leybold Varian Alcatel Osaka Vacuum Balzers-Pfeiffer Ebara Seiko-Seiki Pfeiffer Vacuum Balzers Edwards

Common Applications

semiconductor fabrication

thin-film deposition

vacuum coating

surface analysis

mass spectrometry

research laboratories

Buying Guide

Turbo Pump Buying Considerations

  • Evaluate the required pumping speed for your application to select an appropriately rated pump.
  • Consider the level of vacuum your process needs to ensure the pump can achieve and maintain the desired pressure.
  • Check compatibility with existing vacuum systems, including flange types and control interfaces.
  • Understand the maintenance requirements and availability of replacement parts for the specific model.
  • Ensure the pump's operational noise levels are suitable for your working environment.

Frequently Asked Questions

What are the key benefits of using turbo pumps?
Turbo pumps provide high pumping speeds and can achieve very low pressures, making them ideal for semiconductor fabrication and other high-vacuum applications.
How does a turbo pump work?
Turbo pumps use rapidly rotating blades to create molecular momentum that effectively reduces pressure in a vacuum chamber.
What maintenance do turbo pumps require?
Regular maintenance includes checking for leaks, bearing lubrication, and rotor inspection to ensure optimal performance.
Are there different types of turbo pumps?
Yes, they include hybrid turbo pumps, maglev turbo pumps, and oil-lubricated turbo pumps, each suited to specific applications and environments.