Cryopumps

Cryopumps are vacuum pumps that use cold temperatures to capture gases and vapors inside semiconductor manufacturing processes. They enhance manufacturing precision and efficiency by maintaining ultra-high vacuum conditions.

  1. CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopumps

    CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopump Note: Pumps to be rebuilt once sold; inquire on lead-time.

  5. CTI CRYOGENICS REBUILT CRYOPUMP 4,000 L/S

    Cryopumps

    CTI CRYOGENICS REBUILT CRYOPUMP 4,000 L/S

    Rebuilt Cryopump with Temperature Sensor

    Pump to be rebuilt at the time of sale

  7. CTI CRYOGENICS CRYOPUMP 4,000 L/S

    Cryopumps

    CTI CRYOGENICS CRYOPUMP 4,000 L/S

    Cryopump with Temperature Gauge

    NB: Pump to be rebuilt once sold, inquire on lead-time.

Popular Manufacturers

CTI Cryogenics CVI Edward CTI Cryogenic Leybold

Common Applications

semiconductor fabrication

thin-film deposition

particle accelerators

mass spectrometers

vacuum coating

research laboratories

Buying Guide

Cryopump Buying Considerations

  • Assess the required pumping speed for your specific application.
  • Consider the cryopump's operational temperature range and compatibility with your system.
  • Look for energy-efficient models to minimize operational costs.
  • Ensure the cryopump is compatible with existing vacuum systems and instrumentation.
  • Evaluate the total cost of ownership, including maintenance and service needs.

Frequently Asked Questions

What is a cryopump?
A cryopump uses low temperatures to trap gases and vapors, creating a vacuum environment.
How are cryopumps used in semiconductor manufacturing?
They are crucial for maintaining the low-pressure environments needed for semiconductor manufacturing processes.
What gases can cryopumps capture?
Cryopumps can capture a wide range of gases including hydrogen, helium, and water vapor.
How often should cryopumps be serviced?
Routine service intervals depend on usage conditions but generally require maintenance every few years.