Silicon Etchers

Silicon etchers are specialized tools used in semiconductor manufacturing to create precise patterns on silicon wafers. They ensure high performance and accuracy in the production of semiconductor devices.

  2. PlasmaQuest Microwave-ECR Plasma system

    Silicon Etchers

    PlasmaQuest Microwave-ECR Plasma system

    • This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool.
    • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
    • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
    • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
    • Originally equipped with a 1000W, but higher input power may be viable.
    • Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered.
    • Configured with 2 modules including power & controls rack and vacuum module.

Popular Manufacturers

Surface Tech Sys PlasmaQuest

Common Applications

semiconductor device fabrication

microelectromechanical systems

nanoelectronics

integrated circuit production

wafer patterning

thin film deposition

Buying Guide

Silicon Etchers Buying Considerations

  • Choose etchers compatible with your specific wafer size requirements.
  • Consider the type of etching process (plasma, dry, or laser) best suited for your application.
  • Evaluate the equipment's throughput and automation features for high-volume production.
  • Check compatibility with existing semiconductor manufacturing processes.
  • Assess maintenance needs and availability of technical support.

Frequently Asked Questions

What are silicon etchers used for?
Silicon etchers are used in semiconductor manufacturing to etch patterns onto silicon wafers.
How do plasma etchers differ from dry etchers?
Plasma etchers use ionized gas to etch, while dry etchers rely on chemical reactions without liquid form.
Can silicon etchers handle large wafer sizes?
Yes, many silicon etchers are designed to accommodate various wafer sizes including large diameters.
What are common issues with silicon etchers?
Common issues include etch uniformity, selectivity, and process repeatability.