Semiconductor Chamber Components

Chamber components are integral parts used in semiconductor manufacturing equipment for optimal processing conditions. They enhance performance and reliability in demanding production environments.

  3. Large Volume UHV Vacuum Chamber with Sturdy Frame

    Other Chamber Components

    Large Volume UHV Vacuum Chamber with Sturdy Frame

    • Stainless steel, metal-sealed chamber engineered for ultra high vacuum applications.
    • Previously used for ECR (electron cyclotron resonance) microwave plasma research.
    • Large chamber ends are removable (via rigging hooks) to ease maintenance and enable significant changes in configuration. 

      SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat. Please see images & other details in PDF posted under "Extended Description". 

  6. Astex HPMS or HPMM Chamber

    Other Chamber Components

    Astex HPMS or HPMM Chamber

    • Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
    • Also available at Cline Innovations:
      • Associated microwave delivery hardware and power subsystems.
      • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.

Popular Manufacturers

Applied Materials Toshiba Ceramics Co. Astex (Seki Diamond UHV Instruments Applied Materials In

Common Applications

thin film deposition

etching

ion implantation

wafer cleaning

plasma processing

chemical vapor deposition

Buying Guide

Chamber Components Buying Considerations

  • Ensure component compatibility with existing chamber systems to prevent integration issues.
  • Assess materials for chemical resistance and thermal stability under process conditions.
  • Evaluate the precision of component dimensions to ensure sealing integrity and fit.
  • Consider the reputation and reliability of the brand or supplier for post-purchase support.
  • Verify the condition and any refurbishment status of surplus components before purchase.

Frequently Asked Questions

What are semiconductor chamber components?
These are parts used within semiconductor process chambers to facilitate various manufacturing processes.
How do chamber components affect semiconductor manufacturing?
They maintain the necessary conditions inside the chamber, affecting the quality and efficiency of production.
What should be considered when selecting chamber components?
Consider compatibility with existing systems, material quality, thermal resistance, and dimensional accuracy.
Are surplus chamber components reliable?
Yes, surplus components can be reliable, provided they are sourced from reputable platforms and are in good condition.