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Ion Implantation Equipment


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Group Listings into sub-categories under Ion Implantation EquipmentGroup Listings into sub-categories under Ion Implantation Equipment

List all 2 product types under Ion Implantation EquipmentList all 2 product types under Ion Implantation Equipment
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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
254118
Varian  

Varian  

E500 EHP 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AMAT VARIAN E500 EHP, 200mm, s/n: ES193877:

ION IMPLANTATION SYSTEM

 1   Singapore
254119
Varian  

Varian  

EHP 500 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AMAT VARIAN EHP 500, 200mm, s/n: ES193496:

ION IMPLANTATION SYSTEM

 1   Singapore
249205
Applied Materials  

Applied Materials  

Quantum Leap II 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AMAT, Quantum Leap II, 200mm, S/N Q615:

AMAT, Quantum Leap II, 200mm, S/N Q615

Low Energy Implanter

 1   Singapore
254109
AMAT  

AMAT  

Quantum Leap II 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Applied Material Quantum Leap II, 200mm, Q720:

Low Energy Implanter

 1   Singapore
254162
Axcelis Technologies  

Axcelis Technologies  

NV-GSD/HE 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

 1   Singapore
252684
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

-currently tool is still warm down

 1   Kulim, Kedah
252685
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

Tool is currently under Warm down.

 1   Kulim, Kedah
243574
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis, Optima MD, 300mm, s/n: 083011, IMP203:

Axcelis, Optima MD, 300mm, s/n: 083011

Medium Current Implant

 1   Dresden, Saxony
243575
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis, Optima MD, 300mm, s/n: 083015, IMP205:

Axcelis, Optima MD, 300mm, s/n: 083015

Medium Current Implant

 1   Dresden, Saxony
250598
Axcelis Technologies  

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

 1   Dresden, Saxony
251212
Eaton  

Eaton  

GSD200E/80 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Eaton GSD200E/80 Highcurrent:
Energy Config:0 - 80Kv Highcurrent
Serialnumber:80517
Build Year:2000
Date of first usage:begin of year 2001
Current Condition: Good
CE-Conformity:Yes
Cryo-Pumps:CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko STP A2203 fully refurbed included!!
Terminal-Rough-Pump:without (Edwards Config)
Endstation Rough-Pump:without (Edwards Config)
Wafersize:200mm
Disk-Type:Si-coated Disk fully refurbed included!!
Wafer-Cooling:no Disk-Chiller included !
Gasbox:5-String, 4x Toxic-Low-Pressure
String1:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String3:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String4:SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String5:Argon Carriergas; MFC Brooks GF120 10sccm-N2
Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Hghvoltage-Transformer:dry
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE
Second-Workstationwithout
Software-Version:6.13.5.1 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:V6 Type
Conditiontool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
Notes:slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg
 Clean-Room Table on frontside not included
 Original Lower Machine Front Panels not included (below the Table)
 Rough-Pumps not included
 Endstation Flowhood not included
 Disk-Chiller not included
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
 1   Regensburg, Bavaria


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Ion Implantation Equipment:
AMAT, Applied Materials, Inc., Axcelis Technologies GmbH, Eaton, Varian