| Energy Config: | 0 - 80Kv Highcurrent |
| Serialnumber: | 80517 |
| Build Year: | 2000 |
| Date of first usage: | begin of year 2001 |
| Current Condition: | Good |
| CE-Conformity: | Yes |
| Cryo-Pumps: | CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!! |
| Cryo-Kompressor: | CTI 9650 Low-Voltage |
| Turbo-Pumps: | Seiko STP A2203 fully refurbed included!! |
| Terminal-Rough-Pump: | without (Edwards Config) |
| Endstation Rough-Pump: | without (Edwards Config) |
| Wafersize: | 200mm |
| Disk-Type: | Si-coated Disk fully refurbed included!! |
| Wafer-Cooling: | no Disk-Chiller included ! |
| Gasbox: | 5-String, 4x Toxic-Low-Pressure |
| String1: | PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 |
| String2: | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 |
| String3: | AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 |
| String4: | SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 |
| String5: | Argon Carriergas; MFC Brooks GF120 10sccm-N2 |
| Disk-Drive: | Direct-Drive |
| Dose-Type: | Regular |
| Source-Type: | ELS4 IHC-Source without Vaporizer |
| Hghvoltage-Transformer: | dry |
| Light-Tower: | red/yellow/green; no buzzer |
| Main-Workstation | SUN Solaris AXI 3HE |
| Second-Workstation | without |
| Software-Version: | 6.13.5.1 (no license included) |
| Network: | 24port 100MB Ethernet with Cisco Router-Kit |
| Cell-Controller: | V6 Type |
| Condition | tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024 |
| Availability | Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers |
| Notes: | slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg |
| | Clean-Room Table on frontside not included |
| | Original Lower Machine Front Panels not included (below the Table) |
| | Rough-Pumps not included |
| | Endstation Flowhood not included |
| | Disk-Chiller not included |
| | modified Plasma-Gun Power-Supply installed(TDK) |
| | Minor modifications on tool |
| | No Manual-Set/ no Spares |
| | If required, tool can be inspected on site |
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