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Lithography Equipment


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Group Listings into sub-categories under Lithography EquipmentGroup Listings into sub-categories under Lithography Equipment

List all 20 product types under Lithography EquipmentList all 20 product types under Lithography Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
254171
ASML  

ASML  

5500 / 275D 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254474
ASML  

ASML  

AT400C 

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1   Singapore
254366
ASML  

ASML  

AT850C 

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1   Singapore
254365
ASML  

ASML  

AT850C 

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1   Singapore
254257
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

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1   Malta, New York
254256
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254107
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254111
ASML  

ASML  

XT1400E 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore
254110
ASML  

ASML  

XT1900Gi 

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ASML XT1900Gi, 300mm, s/n: 5884:

Immersion scanner

1   Singapore
254199
ASML  

ASML  

Yieldstar S-200B 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
254167
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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in Lithography Equipment

1   Singapore
254164
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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in Lithography Equipment

1   Singapore
254163
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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in Lithography Equipment

AXCELIS PCU 200, 200mm, s/n: PU6C289X:

PHOTOSTABILIZER

1   Singapore
254165
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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in Lithography Equipment

1   Singapore
254166
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254917
Canon  

Canon  

5500iZ 

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in Wafer Steppers

CANON 5500iZ:

still in production, deinstallation date 01.02.25

1) no harddisk in stepper Workstation (EWS) installed:
backup of stepper system parameter available
2) No Hg-lamp installed
3) No UPS unit installed.
4) all batteries, C-oil and cooling fluid will be removed before shipping because of safety regulations
5) no MO drive installed

- wafer handling and wafer chuck configured for 12" wafer processing
- SMIF pod reticle changer
- 6" reticle size

1   N* Regensburg, Bavaria
249646
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive.

EOL: optical parts

1   Dresden, Saxony
249647
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 

 

1   Dresden, Saxony
250700
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
250701
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
254473
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
254364
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
254247
KLA-Tencor  

KLA-Tencor  

Archer A500 AIM 

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in Lithography Equipment

1   Malta, New York
255101
KLA-Tencor  

KLA-Tencor  

Archer A500 LCM 

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in Lithography Equipment

1   Santa Clara, California
255100
KLA-Tencor  

KLA-Tencor  

Archer A500 LCM 

List all items of this typeLithography Equipment - Other

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1   Malta, New York
253369
KLA-Tencor  

KLA-Tencor  

5200 

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1   Burlington, Vermont
254368
KLA-Tencor  

KLA-Tencor  

TERON 650 

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1   Malta, New York
254226
Lasertec  

Lasertec  

BI100 

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Lasertec BI100, s/n: BA002A408JR:

EUV Reticle Back Side Inspection

1   Malta, New York
254329
Nikon  

Nikon  

S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore
248319
Nikon  

Nikon  

NSR-2205EX14C 

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in Wafer Steppers

Nikon, NSR-2205EX14C, 200mm, S/N 7573113:

Nikon, NSR-2205EX14C, 200mm, S/N 7573113

1   Singapore
248320
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

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Nikon, NSR-2205EX14C, 200mm, S/N 7573120:

Nikon, NSR-2205EX14C, 200mm, S/N 7573120

1   Singapore
249907
Nikon  

Nikon  

NSR-S208D 

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NIKON, NSR-S208D, 300mm, s/n: 8732039. LKSC760:

NIKON Main Body

1   Singapore
247027
Nikon  

Nikon  

NSR-S208D 

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NIKON, NSR-S208D, 300mm, s/n: 8732048:

NIKON, NSR-S208D, 300mm, s/n: 8732048

Lithography Step and repeat scanning system

1   Dresden, Saxony
247605
Nikon  

Nikon  

NSR-S208D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

NIKON, NSR-S208D, 300mm, s/n: S62 0290202:

Lithography Step and repeat scanning system

1   Dresden, Saxony
249036
Suss MicroTec  

Suss MicroTec  

ACS200 Gen3 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm:

Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm

Suss spray coater

1   East Fishkill, New York
248241
Suss Tamarack Scient  

Suss Tamarack Scient  

TAMARACK M423 EXCIMER 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   East Fishkill, New York
254475
Tel  

Tel  

ACT12 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore
254137
Tel  

Tel  

ACT8 

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1   Singapore
250840
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250841
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250843
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250839
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250847
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250842
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250844
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250846
Tel  

Tel  

ACT8 

List all items of this typeManual Photoresist Coaters

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1   Singapore
250849
Tel  

Tel  

ACT8 

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TEL ACT8, 200mm, sn: 9211869:

TCDEV-24 JUSTIN ACT TRACK FOR 0.25um (former TCDEV-39)

1   Singapore
254477
Tel  

Tel  

LITHIUS PRO-I 

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1   Singapore
254106
Tel  

Tel  

Lithius ProV 

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1   Malta, New York
254101
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V110231:

Immersion Coat and Develop

1   Malta, New York
254102
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V110233:

Immersion Coat and Develop

1   Malta, New York
254103
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V120318:

Immersion Coat and Develop

1   Malta, New York
254240
Tel  

Tel  

Lithius ProVi 

List all items of this typeManual Photoresist Coaters

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1   Malta, New York
254242
Tel  

Tel  

LITHIUS 

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1   Singapore
255441
Tel  

Tel  

LITHIUS 

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in Photoresist Coaters

1   Dresden, Saxony
255442
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Dresden, Saxony
255443
Tel  

Tel  

LITHIUS 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Dresden, Saxony
251087
Tel  

Tel  

MARK8 

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in Photoresist Coaters

1   Singapore
250488
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1   Dresden, Saxony
250489
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1   Dresden, Saxony
250490
Tel  

Tel  

MK7-S 

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1   Dresden, Saxony
250491
Tel  

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1   Dresden, Saxony
254104
Tel  

Tel  

PROi 

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TEL PROi, 300mm, s/n: N100355:

Cot / DEV

1   Dresden, Saxony
254241
Tel  

Tel  

ProZ 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
249204
Tokyo Electron Limit  

Tokyo Electron Limit  

LITHIUS I+ 

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TEL, LITHIUS I+, 300mm, S/N G481358:

TEL, LITHIUS I+, 300mm, S/N G481358

1   Singapore
233207
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Lithius 

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TEL, Lithius, 300mm, S/N G260815:

TEL, Lithius, 300mm, S/N G260815

1   Singapore
245289
Tokyo Electron Limit  

Tokyo Electron Limit  

8181523 

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TEL, Mark 8, 200mm, S/N 8181523:

TEL, Mark 8, 200mm, S/N 8181523

SOG Coater. 2 coaters only.

1   Singapore


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Lithography Equipment:
ASML, Axcelis Technologies GmbH, Canon, InnerSense, KLA-Tencor, Lasertec, Nikon, Nikon, Suss MicroTec, Suss Tamarack Scient, Tel, Tokyo Electron Limited, Tokyo Electronics Limited